This paper describes work towards the use of integrated microelectromechanical systems (MEMS) technology to shrink atomic clocks from their present-day table-top sizes down to only one cubic-centimeter, while retaining exceptional timing stability on the order of 10-11 Allan deviation integrated over one hour, and all while consuming less than 30 mW of power.
atomic clock, chip-scale atomic clock, compact frequency reference, MEMS, microfabrication
and Kitching, J.
Toward chip-scale atomic clocks, Proc. Intl. Solid State Circuits Conf., ISSCC, Leuven, 1, BE, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50092
(Accessed May 29, 2023)