Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Total Scattering Cross Section Measurements Using a Dual Faraday Cup with a 5 Micron Aperture

Published

Author(s)

Scott A. Wight, Andrew R. Konicek

Abstract

Scattering in the variable pressure scanning electron microscope (VPSEM) affects image resolution and the ability to perform quantitative chemical measurements. However, the manner in which the total scattering cross section varies as a function of gas type and accelerating voltage is not well understood. A dual Faraday cup is constructed to measure the scattered fraction of the primary beam as a function of gas type, gas pressure, working distance, and accelerating voltage. While measured values of the total scattering cross section agree with previous work, the values calculated from theory disagree with the measured by a factor of 2. Further work needs to be done to improve the accuracy of the calculated values, which will be useful for the VPSEM community.
Citation
Microscopy and Microanalysis
Volume
43
Issue
9

Keywords

total scattering cross section, beam gas path length, electron scattering, environmental scanning electron microscope, ESEM, Faraday cup, VPSEM

Citation

Wight, S. and Konicek, A. (2012), Total Scattering Cross Section Measurements Using a Dual Faraday Cup with a 5 Micron Aperture, Microscopy and Microanalysis, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909004 (Accessed May 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 25, 2012, Updated February 19, 2017