Tip Characterization for Dimensional Nanometrology
John S. Villarrubia
Technological trends are increasingly requiring dimensional metrology at size scales below a micrometer. Scanning probe microscopy has unique advantages in this size regime, but width and roughness measurements must be corrected for imaging artifacts. This chapter aims to acquaint the reader with important measurement issues associated with the finite size of SPM tips and to make accessible in practical form recent advances in tip and sample reconstruction techniques. To that end, in addition to a general introduction to the ideas, references are given to computer codes, and recipes or procedures for the application of those codes to typical measurements.
Chapter in: Industrial SXM Techniques
Springer-Verlag, Berlin Heidelberg, New York, NY
atomic force microscopy, blind reconstruction, dilation, erosion, scanning probe microscopy, scanning tunneling microscopy, tip artifacts, tip estimation