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Thermal Conductivity Measurements of Thin-Film Silicon Dioxide

Published

Author(s)

Harry A. Schafft, John S. Suehle, P. G. Mirel
Proceedings Title
Proc. ICMTS 1989, Intl. Conf. on Microelectronic Test Structures
Conference Dates
March 13-14, 1989
Conference Location
Edinburgh, 1, UK

Citation

Schafft, H. , Suehle, J. and Mirel, P. (1989), Thermal Conductivity Measurements of Thin-Film Silicon Dioxide, Proc. ICMTS 1989, Intl. Conf. on Microelectronic Test Structures, Edinburgh, 1, UK (Accessed May 24, 2024)

Issues

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Created December 30, 1989, Updated October 12, 2021