Schafft, H.
, Suehle, J.
and Mirel, P.
(1989),
Thermal Conductivity Measurements of Thin-Film Silicon Dioxide, Proc. ICMTS 1989, Intl. Conf. on Microelectronic Test Structures, Edinburgh, 1, UK
(Accessed May 29, 2025)
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Thermal Conductivity Measurements of Thin-Film Silicon Dioxide
Published
Author(s)
, , P. G. Mirel
Proceedings Title
Proc. ICMTS 1989, Intl. Conf. on Microelectronic Test Structures
Conference Dates
March 13-14, 1989
Conference Location
Edinburgh, 1, UK
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created December 30, 1989, Updated October 12, 2021