Thermal and Acoustic Pulse Studies of Space-Charge Profiles in Electron-Irradiated Fluoroethylene Propylene

Published

February 1, 2000

Author(s)

P Bloss, A S. DeReggi, G M. Yang, G M. Sessler, H Schafer

Abstract

We report complementary studies of space charge distributions in electron-beam irradiated fluoroethylene propylene (FEP) thicknesses of 13 and 26 m) using the thermal pulse (TP) method and the laser-induced pressure-pulse (LIPP) method. The distributions obtained by the two methods are compared to show the strengths of both methods, the high near-surface resolution of the TP method (better than 100 nm) and the nearly constant resolution versus depth of the LIPP method (1 to 2 m). In addition to the expected implanted negative charge at a depth governed by the electron energy, a negative near-surface charge layer was found close to the metal/FEP interface if the electron beam entered the dielectric through that interface. This finding provides new insights into the charging of dielectrics using electron beams.

Citation

Journal of Physics D-Applied Physics

Volume

33

Issue

No. 4

Pub Type

Journals

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Keywords

diffusion, electret, electron-irradiated, polarization, simox

Citation

Bloss, P. , DeReggi, A. , Yang, G. , Sessler, G. and Schafer, H. (2000), Thermal and Acoustic Pulse Studies of Space-Charge Profiles in Electron-Irradiated Fluoroethylene Propylene, Journal of Physics D-Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851649 (Accessed May 18, 2024)