NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

A TES X-ray Spectrometer for NSENSE

Published

Author(s)

Christine G. Pappas, Malcolm S. Durkin, Joseph W. Fowler, Kelsey M. Morgan, Joel N. Ullom, William B. Doriese, Gene C. Hilton, Galen C. O'Neil, Daniel R. Schmidt, Paul Szypryt, Daniel S. Swetz

Abstract

The Non-destructive Statistical Estimation of Nanoscale Structures and Electronics NSENSE instrument for IARPAs Rapid Analysis of Various Emerging Nanoelectronics RAVEN program is a tabletop X-ray tomography prototype designed for three-dimensional imaging of integrated circuits with 10 nm spatial resolution. Here, we describe the X-ray detector for NSENSE, our 240-pixel superconducting Transition-edge SensorTES spectrometer. It achieves an energy resolution of 12 eV at 8.0 keV at a photon rate of 200 counts per second per pixel. Precise energy resolution is necessary for the NSENSE concept, and is not achievable with any other energy dispersive detector. We plan to build TES spectrometers of 3,000 and 10,000 pixels for RAVEN Phase II and III, respectively, for faster imaging.
Proceedings Title
A TES X-ray Spectrometer for NSENSE
Conference Dates
March 25-28, 2019
Conference Location
Albuquerque, NM
Conference Title
GOMACTech-19
Pub Type
Conferences

Download Paper

Local Download

Keywords

scanning electron microscopes, quantum efficiency, multiplexing, integrated circuits, heat capacity, high energy, x-ray detectors, tomography, IARPAs, RAVEN, Rapid Analysis of Various Emerging Nanoelectronics
Spectroscopy and Physics

Citation

Pappas, C. , Durkin, M. , Fowler, J. , Morgan, K. , Ullom, J. , Doriese, W. , Hilton, G. , O'Neil, G. , Schmidt, D. , Szypryt, P. and Swetz, D. (2019), A TES X-ray Spectrometer for NSENSE, A TES X-ray Spectrometer for NSENSE, Albuquerque, NM, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927312 (Accessed October 14, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created March 24, 2019, Updated July 8, 2020
Was this page helpful?