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The Non-destructive Statistical Estimation of Nanoscale Structures and Electronics NSENSE instrument for IARPAs Rapid Analysis of Various Emerging Nanoelectronics RAVEN program is a tabletop X-ray tomography prototype designed for three-dimensional imaging of integrated circuits with 10 nm spatial resolution. Here, we describe the X-ray detector for NSENSE, our 240-pixel superconducting Transition-edge SensorTES spectrometer. It achieves an energy resolution of 12 eV at 8.0 keV at a photon rate of 200 counts per second per pixel. Precise energy resolution is necessary for the NSENSE concept, and is not achievable with any other energy dispersive detector. We plan to build TES spectrometers of 3,000 and 10,000 pixels for RAVEN Phase II and III, respectively, for faster imaging.
A TES X-ray Spectrometer for NSENSE
March 25-28, 2019
scanning electron microscopes, quantum efficiency, multiplexing, integrated circuits, heat capacity, high energy, x-ray detectors, tomography, IARPAs, RAVEN, Rapid Analysis of Various Emerging Nanoelectronics