Skip to main content

NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Terahertz On-wafer mTRL Calibration Kits For Microelectronics Characterization

Published

Author(s)

Jerome Cheron, Robert Jones, Bryan Bosworth, Jeffrey Jargon, Benjamin Jamroz, Ari Feldman

Abstract

We report accurate small-signal measurements of heterojunction-bipolar-transistors (HBTs) that are characterized with two on-wafer multiline thru-reflect-line (mTRL) calibration kits. The first calibration kit is designed with thin-film microstrip standards that are optimized for the characterization of multi-finger transistor cells while the second calibration kit integrates inverted grounded coplanar waveguide (G-CPW) transmission line standards to provide accurate characterization of single-finger transistor devices. We characterize the two calibration kits up to 500 GHz and 1100 GHz, respectively, and demonstrate high accuracy in small-signal measurements of single and multi-finger HBTs up to 325 GHz.
Proceedings Title
The International Society of Infrared, Millimeter, and Terahertz Waves 2024
Conference Dates
September 1-6, 2024
Conference Location
Perth, AU

Keywords

on-wafer calibration, multiline thru-reflect-line (mTRL), terahertz (THz) frequencies, heterojunction-bipolar-transistors (HBTs)

Citation

Cheron, J. , Jones, R. , Bosworth, B. , Jargon, J. , Jamroz, B. and Feldman, A. (2024), Terahertz On-wafer mTRL Calibration Kits For Microelectronics Characterization, The International Society of Infrared, Millimeter, and Terahertz Waves 2024, Perth, AU, [online], https://doi.org/10.1109/IRMMW-THz60956.2024.10697705, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957785 (Accessed October 3, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created October 7, 2024, Updated December 9, 2024
Was this page helpful?