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PUBLICATIONS

Terahertz On-wafer mTRL Calibration Kits For Microelectronics Characterization

Published

Author(s)

Jerome Cheron, Robert Jones, Bryan Bosworth, Jeffrey Jargon, Benjamin Jamroz, Ari Feldman

Abstract

We report accurate small-signal measurements of heterojunction-bipolar-transistors (HBTs) that are characterized with two on-wafer multiline thru-reflect-line (mTRL) calibration kits. The first calibration kit is designed with thin-film microstrip standards that are optimized for the characterization of multi-finger transistor cells while the second calibration kit integrates inverted grounded coplanar waveguide (G-CPW) transmission line standards to provide accurate characterization of single-finger transistor devices. We characterize the two calibration kits up to 500 GHz and 1100 GHz, respectively, and demonstrate high accuracy in small-signal measurements of single and multi-finger HBTs up to 325 GHz.
Proceedings Title
The International Society of Infrared, Millimeter, and Terahertz Waves 2024
Conference Dates
September 1-6, 2024
Conference Location
Perth, AU
Pub Type
Conferences

Download Paper

https://doi.org/10.1109/IRMMW-THz60956.2024.10697705
Local Download

Keywords

on-wafer calibration, multiline thru-reflect-line (mTRL), terahertz (THz) frequencies, heterojunction-bipolar-transistors (HBTs)
Metrology and Electronics

Citation

Cheron, J. , Jones, R. , Bosworth, B. , Jargon, J. , Jamroz, B. and Feldman, A. (2024), Terahertz On-wafer mTRL Calibration Kits For Microelectronics Characterization, The International Society of Infrared, Millimeter, and Terahertz Waves 2024, Perth, AU, [online], https://doi.org/10.1109/IRMMW-THz60956.2024.10697705, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=957785 (Accessed October 20, 2025)

Issues

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Created October 7, 2024, Updated December 9, 2024
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