Temperature Measurements of Microhotplates Using Fluorescence Thermometry

Published

March 1, 2006

Author(s)

Christopher W. Meyer, Douglas C. Meier, Christopher B. Montgomery, Stephen Semancik

Abstract

A fluorescence microscope has been constructed for measuring surface temperatures of microhotplate platforms. The microscope measures temperature-dependent fluorescence lifetimes of a film of the phosphor Mg4(F)GeO6:Mn which is deposited on the microhotplate. Temperature/fluorescence-lifetime relations for this phosphor are determined by measuring the fluorescence lifetime of the phosphor-coated hot junction of a type S thermocouple while controlling and monitoring its temperature. These fluorescence-lifetime measurements have been used to determine the average temperature of microhotplates. Studies have been performed on the temperature stability of the microhotplates under steady heating and on the reproducibility of the temperatures achieved under thermal cycling. Fluorescence-intensity thermometry has been used to measure the thermal response time of microhotplates. This work demonstrates the potential of fluorescence thermometry for characterizing microhotplate performance.

Citation

Sensors and Actuators B-Chemical

Volume

127

Issue

2

Pub Type

Journals

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Keywords

chemical sensors, fluorescence, MEMS, microhotplates, temperature measurement, thermometry

Citation

Meyer, C. , Meier, D. , Montgomery, C. and Semancik, S. (2006), Temperature Measurements of Microhotplates Using Fluorescence Thermometry, Sensors and Actuators B-Chemical, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830927 (Accessed October 22, 2025)