Technology Trends Assessment - Thin Film Thermal Conductivity Measurement
The purpose of this document is to propose a standard procedure for measuring the thermal conductivity of insulating thin films on silicon substrates. The initial part of the assessment is a review of several measurement methods that have been used to measure the thermal conductivity of such films. Based on a recent interlaboratory comparison, a recommendation is made for the adoption of the three omega method as a standard measurement method. A draft standard measurement procedure is proposed.
electro-thermal reflectance, photo-thermal reflectance, pulsed photo-thermal reflectance, round robin, thermal reflectance methods, thin film thermal conductivity, three omega method