Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Technology Trends Assessment - Thin Film Thermal Conductivity Measurement

Published

Author(s)

A Feldman

Abstract

The purpose of this document is to propose a standard procedure for measuring the thermal conductivity of insulating thin films on silicon substrates. The initial part of the assessment is a review of several measurement methods that have been used to measure the thermal conductivity of such films. Based on a recent interlaboratory comparison, a recommendation is made for the adoption of the three omega method as a standard measurement method. A draft standard measurement procedure is proposed.
Citation
ISO Bulletin

Keywords

electro-thermal reflectance, photo-thermal reflectance, pulsed photo-thermal reflectance, round robin, thermal reflectance methods, thin film thermal conductivity, three omega method

Citation

Feldman, A. (2017), Technology Trends Assessment - Thin Film Thermal Conductivity Measurement, ISO Bulletin (Accessed May 25, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created February 19, 2017