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Surface Oxidation as a Diffusion Barrier for Al Deposited on Ferromagnetic Metals



William F. Egelhoff Jr., P J. Chen, Robert D. McMichael, Cedric J. Powell, R Deslattes, F G. Serpa, Romel Gomez


We have used Grazing Incidence X-ray Reflectometry (GIXR) to study surface oxidation as a diffusion barrier for Al deposited on ferromagnetic metals (Co, Fe, Ni, and NiFe). Samples of the form SiO2 // 10nm X / 4nm Al and SiO2 // 10nm X/ 4nm Au with X = (Co, Fe, Ni and NiFe) were studied. Surface oxidation was achieved by exposing the newly deposited ferromagnetic layer to oxygen gas to oxidize the top two or three atomic layers before depositing the Al layer. Specular X-ray scans are presented and analyzed. We find that in general the surface oxidation reduces the diffusion of Al into the ferromagnetic metals.
Journal of Applied Physics
No. 9


diffusion barrier, grazing reflectometry, x-ray reflectometry


Egelhoff, W. , Chen, P. , McMichael, R. , Powell, C. , Deslattes, R. , Serpa, F. and Gomez, R. (2001), Surface Oxidation as a Diffusion Barrier for Al Deposited on Ferromagnetic Metals, Journal of Applied Physics (Accessed May 26, 2024)


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Created May 1, 2001, Updated February 17, 2017