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Superconducting micro-resonator arrays with ideal frequency spacing



Xiangliang Liu, Weijie Guo, Y Wang, M Dai, L F. Wei , Bradley J. Dober, Christopher M. McKenney, Gene C. Hilton, Johannes Hubmayr, Jason E. Austermann, Joel Ullom, Jiansong Gao, Michael Vissers


We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode mapper technique demonstrated previously, we first map the measured resonance frequencies to the physical resonators. Then, we fine-tune each resonator's frequency by lithographically trimming a small length, calculated from the deviation of the measured frequency from its design value, from the interdigitated capacitor. We demonstrate this technique on a 127-resonator array made from titanium-nitride and show that the uniformity of frequency spacing is greatly improved. The array yield in terms of frequency collisions improves from 84% to 97%, while the quality factors and noise properties are unaffected. The wafer trimming technique provides an easy-to-implement tool to improve the yield and multiplexing density of large resonator arrays, which is important for various applications in photon detection and quantum computing.
Applied Physics Letters


kinetic inductance detector, superconducting micro-resonator, wafer, light-emitting diode mapper technique, interdigitated capacitor, titanium-nitride, photon detection, quantum computing


Liu, X. , Guo, W. , Wang, Y. , Dai, M. , Wei, L. , Dober, B. , McKenney, C. , Hilton, G. , Hubmayr, J. , Austermann, J. , Ullom, J. , Gao, J. and Vissers, M. (2017), Superconducting micro-resonator arrays with ideal frequency spacing, Applied Physics Letters, [online],, (Accessed May 20, 2024)


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Created December 19, 2017, Updated October 12, 2021