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Superconducting micro-resonator arrays with ideal frequency spacing
Published
Author(s)
Xiangliang Liu, Weijie Guo, Y Wang, M Dai, L F. Wei , Bradley J. Dober, Christopher M. McKenney, Gene C. Hilton, Johannes Hubmayr, Jason E. Austermann, Joel Ullom, Jiansong Gao, Michael Vissers
Abstract
We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode mapper technique demonstrated previously, we first map the measured resonance frequencies to the physical resonators. Then, we fine-tune each resonator's frequency by lithographically trimming a small length, calculated from the deviation of the measured frequency from its design value, from the interdigitated capacitor. We demonstrate this technique on a 127-resonator array made from titanium-nitride and show that the uniformity of frequency spacing is greatly improved. The array yield in terms of frequency collisions improves from 84% to 97%, while the quality factors and noise properties are unaffected. The wafer trimming technique provides an easy-to-implement tool to improve the yield and multiplexing density of large resonator arrays, which is important for various applications in photon detection and quantum computing.
Liu, X.
, Guo, W.
, Wang, Y.
, Dai, M.
, Wei, L.
, Dober, B.
, McKenney, C.
, Hilton, G.
, Hubmayr, J.
, Austermann, J.
, Ullom, J.
, Gao, J.
and Vissers, M.
(2017),
Superconducting micro-resonator arrays with ideal frequency spacing, Applied Physics Letters, [online], https://doi.org/10.1063/1.5016190, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924672
(Accessed October 7, 2025)