Bouldin, C.
, Woicik, J.
, Ravel, B.
, Kaiser, D.
and Vaudin, M.
(2021),
Stoichiometry and Phase Composition of MOCVD Barium Titanate Films, Journal of Materials Research
(Accessed January 11, 2026)
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Stoichiometry and Phase Composition of MOCVD Barium Titanate Films
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Abstract
X-ray absorption fine structure (XAFS), x-ray diffraction (XRD) and x-ray fluorescence (XRF) have been used to study the stoichiometry and phase composition of thin (approximately equal to} 1 micron) films deposited on MgO substrates. Deposition temperatures were 600 degrees}C to 800 degrees}C and film growth rates were approximately equal to} 1 Angstrom/s. When the films are very Ba-rich, they form amorphous films of di-Barium Titanate, while the Ba-deficient films deposited at low temperatures form amorphous phases that are similar to Barium Titanate (BaTi03) but with BA vacancies and orientational disorder of the Ti-0 octahedra.Citation
Journal of Materials Research
Pub Type
Journals
Keywords
dielectric constant, EXAFS, MOCVD, XANES
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Created October 12, 2021