SPM-Based Lithography for Electronics Device Fabrication: New Strategies and Directions
John A. Dagata
Direct patterning of a semiconductor surface to produce an ultrathin oxide mask has proven to be a promising approach for integrating lithographic methods based on scanned probe microscopy (SPM) into existing electronics device processing. The resulting masks are capable of withstanding the necessary etching and thermal cycling required for pattern development. Recent work has validated the concept for the fabrication of silicon devices. The current challenges which face this active research area will now require a detailed, predictive understanding of the mechanism responsible for oxidation within an SPM junction in order for the process to be optimized with respect to write speed, resolution, and reliability.
Proceedings of Materials Research Society Symposium