Kim, J.
, Germer, T.
, Mulholland, G.
and Ehrman, S.
(2002),
Size-Monodisperse Metal Nanoparticles Via Hydrogen-Free Spray Pyrolysis, Advanced Materials
(Accessed June 2, 2023)
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Size-Monodisperse Metal Nanoparticles Via Hydrogen-Free Spray Pyrolysis
Published
Author(s)
Jung Hyeun Kim, , , S H. Ehrman
Abstract
Pure copper nanoparticles were produced using a co-solvent approach avoiding use of hydrogen or other reducing gas. Compared with the particles formed without the co-solvent, the addition of alcohol has a significant effect in preventing oxidation, which is attributed to the strong reducing atmosphere created during co-solvent decomposition. Furthermore, we could classify uniform size particles by using a droplet impactor plate to eliminate larger droplets at the atomizer prior to entering the reactor furnace. These size-monodisperse particles can be deposited on a silicon substrate to obtain a specific particle number density by controlling deposition parameters, and they can further be used as a particle standard for testing light scattering models for semiconductor metrology.Citation
Advanced Materials
Pub Type
Journals
Keywords
copper particles, hydrogen-free, light scattering, nanoparticles, size standard, size-monodisperse, spray pyrolysis, uniform size
Citation
Created April 3, 2002, Updated August 2, 2022