Size-Monodisperse Metal Nanoparticles Via Hydrogen-Free Spray Pyrolysis
Jae H. Kim, Thomas Germer, George W. Mulholland, S H. Ehrman
Pure copper nanoparticles were produced using a co-solvent approach avoiding use of hydrogen or other reducing gas. Compared with the particles formed without the co-solvent, the addition of alcohol has a significant effect in preventing oxidation, which is attributed to the strong reducing atmosphere created during co-solvent decomposition. Furthermore, we could classify uniform size particles by using a droplet impactor plate to eliminate larger droplets at the atomizer prior to entering the reactor furnace. These size-monodisperse particles can be deposited on a silicon substrate to obtain a specific particle number density by controlling deposition parameters, and they can further be used as a particle standard for testing light scattering models for semiconductor metrology.