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Size-Monodisperse Metal Nanoparticles Via Hydrogen-Free Spray Pyrolysis



Jung Hyeun Kim, Thomas A. Germer, George Mulholland, S H. Ehrman


Pure copper nanoparticles were produced using a co-solvent approach avoiding use of hydrogen or other reducing gas. Compared with the particles formed without the co-solvent, the addition of alcohol has a significant effect in preventing oxidation, which is attributed to the strong reducing atmosphere created during co-solvent decomposition. Furthermore, we could classify uniform size particles by using a droplet impactor plate to eliminate larger droplets at the atomizer prior to entering the reactor furnace. These size-monodisperse particles can be deposited on a silicon substrate to obtain a specific particle number density by controlling deposition parameters, and they can further be used as a particle standard for testing light scattering models for semiconductor metrology.
Advanced Materials


copper particles, hydrogen-free, light scattering, nanoparticles, size standard, size-monodisperse, spray pyrolysis, uniform size


Kim, J. , Germer, T. , Mulholland, G. and Ehrman, S. (2002), Size-Monodisperse Metal Nanoparticles Via Hydrogen-Free Spray Pyrolysis, Advanced Materials (Accessed December 6, 2023)
Created April 3, 2002, Updated August 2, 2022