Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

In Situ Testing and Calibrating of Z-Piezo of an Atomic Force Microscope

Published

Author(s)

Joseph Fu

Abstract

By scanning a slightly tilted, smooth surface with an atomic force microscope (AFM), it is possible to obtain hysteresis loops which contain information on the nonlinearity and hysteresis in the z axis of the AFM''s piezoelectric actuator. A 15% variation in vertical sensitivity was revealed by this PZT tube during vertical scans ranging in amplitude between 0.4 and 2.5 ?m, which could result in a high level of uncertainty in a vertical measurement. Therefore a separate vertical measuring system or a correction scheme is required for a precise and accurate measurement.
Citation
Review Scientific Instruments
Volume
66(7)

Citation

Fu, J. (1995), In Situ Testing and Calibrating of Z-Piezo of an Atomic Force Microscope, Review Scientific Instruments (Accessed November 30, 2023)
Created July 1, 1995, Updated February 19, 2017