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In-situ Elastic Strain Mapping During Micromechanical Testing Using EBSD



Mark McLean, William A. Osborn


Compared to more commonly used strain measurement techniques, EBSD offers improved spatial resolution and measurement sensitivity. Additionally, EBSD can provide the full deformation tensor, whereas other techniques, such as DIC, are limited to only in-plane strains and rotations. In this work, EBSD was used to measure strains and rotations in-situ during testing of a single-crystal silicon micromechanical test specimen. The theta-like specimen geometry was chosen due to the complex and spatially-varying strain states that exist in the sample during testing. Full-field strain maps were generated for the entire specimen, as well as higher resolution maps on specific areas of interest. The in-situ measurement results were compared to those from FEA and showed strong agreement in all cases. Additionally, the same in-situ experiment was conducted under a confocal microscope to measure the out-of-plane rotation, and showed excellent agreement with the EBSD results as well.


McLean, M. and Osborn, W. (2017), In-situ Elastic Strain Mapping During Micromechanical Testing Using EBSD, Ultramicroscopy, [online], (Accessed July 24, 2024)


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Created November 14, 2017, Updated July 2, 2018