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PUBLICATIONS

A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline

Published

Author(s)

Charles S. Tarrio, Steven E. Grantham, Robert E. Vest, K Liu

Abstract

Beamlines at synchrotron radiation facilities often have interchangeable endstations to allow several different experiments to use the output of a single monochromator. However, for endstations that are sufficiently large, this is not possible. We have developed a simple transfer optics system that allows endstations to be attached to the exit flange of a large extreme-ultraviolet reflectometry facility. The system works as desired and predicted, and we will present preliminary results for two different experiments that use these optics.
Citation
Review of Scientific Instruments
Volume
74
Issue
No 4
Pub Type
Journals

Keywords

detector packages, detectors, EUV lithography, extreme ultraviolet, radiometry, responsivity, synchrotron

Citation

Tarrio, C. , Grantham, S. , Vest, R. and Liu, K. (2005), A Simple Transfer-Optics System for an Extreme-Ultraviolet Synchrotron Beamline, Review of Scientific Instruments (Accessed April 28, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 1, 2005, Updated February 17, 2017