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Search Publications by: Emmanuel Newsome (Fed)

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A constant pressure flowmeter for the extremely high vacuum

August 9, 2022
Author(s)
Stephen Eckel, Daniel Barker, James A. Fedchak, Emmanuel Newsome, Julia Scherschligt, Robert E. Vest
We demonstrate operation of a constant-pressure flowmeter capable of generating and accurately measuring flows as low as $1\times10^-13}$mol/s. Generation of such small flows is accomplished by using a small conductance element with $C\approx 25$nL/s