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Rubidium Vapor Cell with Integrated Bragg Reflectors for Compact Atomic MEMS



Maximillian Perez, Uyen Nguyen, Svenja A. Knappe, Elizabeth Donley, John Kitching, A Shkel


This paper reports on a method for improving the optical efficiency of micro-machined reflectors integrated in rubidium vapor cells for application in atomic MEMS sensors. A hybrid bulk micromachining and multilayer PECVD thin film process is used to form the bragg reflectors on angled sidewalls, which redirect laser light through the vapor cell and back toward the plane of the source with reduced optical power loss. Integrated thin film Bragg reflectors are shown to improve the re-flectance of the micromachined surface by almost three times resulting in an optical return efficiency of two paired dielectric reflectors that is observed to be improved by as much a eight times over uncoated silicon reflectors. Absorption of the 87Rb D1 absorption line at a wavelength of 795 nm in a one cubic millimeter vapor cell is demonstrated experimentally by use of two integrated thin film reflectors with a total optical return efficiency approaching 40 %. The implications of the improved optical efficiency is considered for application of the vapor cell in a miniature gyro-scope based on Nuclear Magnetic Resonance.
Sensors and Actuators A-Physical


atomic MEMS, optical MEMS, vapor cells, bragg reflector, thin fields, PECVD


Perez, M. , Nguyen, U. , Knappe, S. , Donley, E. , Kitching, J. and Shkel, A. (2009), Rubidium Vapor Cell with Integrated Bragg Reflectors for Compact Atomic MEMS, Sensors and Actuators A-Physical, [online], (Accessed June 24, 2024)


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Created June 8, 2009, Updated October 12, 2021