Ellefson, R.
and Miiller, A.
(2021),
Recommended Practice for Calibrating Vacuum Gauges of the Thermal Conductivity Type, Journal of Vacuum Science and Technology A
(Accessed November 29, 2023)
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Recommended Practice for Calibrating Vacuum Gauges of the Thermal Conductivity Type
Published
Author(s)
R E. Ellefson,
Abstract
The recommended procedures and apparatus are described for calibrating vacuum gauges of the thermal conductivity type in the pressure range 10-1 Pa (10-3 Torr) to 105 Pa (760 Torr) by direct comparison with a primary standard or a calibrated transfer standard. One or more capacitance diaphragm gauges of appropriate full scale range or a combination of gauges including a spinning rotor gauge are the recommended choices for this calibration. Good practices in the usage of thermal conductivity gauges are discussed and guidelines for the documentation of calibrations, including preparation of a calibration report and estimation of uncertainties, are also presented.Citation
Journal of Vacuum Science and Technology A
Pub Type
Journals
Keywords
calibration, pressure, recommended practice, thermal conductivity gauges, vacuum gauges
Citation
Created October 12, 2021