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Recommended Practice for Calibrating Vacuum Gauges of the Thermal Conductivity Type

Published

Author(s)

R E. Ellefson, A P. Miiller

Abstract

The recommended procedures and apparatus are described for calibrating vacuum gauges of the thermal conductivity type in the pressure range 10-1 Pa (10-3 Torr) to 105 Pa (760 Torr) by direct comparison with a primary standard or a calibrated transfer standard. One or more capacitance diaphragm gauges of appropriate full scale range or a combination of gauges including a spinning rotor gauge are the recommended choices for this calibration. Good practices in the usage of thermal conductivity gauges are discussed and guidelines for the documentation of calibrations, including preparation of a calibration report and estimation of uncertainties, are also presented.
Citation
Journal of Vacuum Science and Technology A

Keywords

calibration, pressure, recommended practice, thermal conductivity gauges, vacuum gauges

Citation

Ellefson, R. and Miiller, A. (2021), Recommended Practice for Calibrating Vacuum Gauges of the Thermal Conductivity Type, Journal of Vacuum Science and Technology A (Accessed May 29, 2024)

Issues

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Created October 12, 2021