Recommended practice for calibrating vacuum gauges of the ionization type
James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks, Paul C. Arnold, Neil T. Peacock
This document represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.
, Abbott, P.
, Hendricks, J.
, Arnold, P.
and Peacock, N.
Recommended practice for calibrating vacuum gauges of the ionization type, Journal of Vacuum Science and Technology A, [online], https://doi.org/10.1116/1.5025060
(Accessed November 28, 2021)