Published: April 27, 2018
James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks, Paul C. Arnold, Neil T. Peacock
This document represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.
Citation: Journal of Vacuum Science and Technology A
Pub Type: Journals
vacuum, ionization gauge, calibration, vacuum metrology
Created April 27, 2018, Updated November 10, 2018