Recommended practice for calibrating vacuum gauges of the ionization type

Published: April 27, 2018

Author(s)

James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks, Paul C. Arnold, Neil T. Peacock

Abstract

This document represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.
Citation: Journal of Vacuum Science and Technology A
Volume: 36
Issue: 3
Pub Type: Journals

Keywords

vacuum, ionization gauge, calibration, vacuum metrology
Created April 27, 2018, Updated November 10, 2018