Fedchak, J.
, Abbott, P.
, Hendricks, J.
, Arnold, P.
and Peacock, N.
(2018),
Recommended practice for calibrating vacuum gauges of the ionization type, Journal of Vacuum Science and Technology A, [online], https://doi.org/10.1116/1.5025060
(Accessed April 24, 2024)
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Recommended practice for calibrating vacuum gauges of the ionization type
Published
Author(s)
, , , Paul C. Arnold, Neil T. Peacock
Abstract
This document represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.Citation
Journal of Vacuum Science and Technology A
Volume
36
Issue
3
Pub Type
Journals
Download Paper
Keywords
vacuum, ionization gauge, calibration, vacuum metrology
Citation
Created April 27, 2018, Updated November 10, 2018