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Recommended practice for calibrating vacuum gauges of the ionization type

Published

Author(s)

James A. Fedchak, Patrick J. Abbott, Jay H. Hendricks, Paul C. Arnold, Neil T. Peacock

Abstract

This document represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.
Citation
Journal of Vacuum Science and Technology A
Volume
36
Issue
3

Keywords

vacuum, ionization gauge, calibration, vacuum metrology

Citation

Fedchak, J. , Abbott, P. , Hendricks, J. , Arnold, P. and Peacock, N. (2018), Recommended practice for calibrating vacuum gauges of the ionization type, Journal of Vacuum Science and Technology A, [online], https://doi.org/10.1116/1.5025060 (Accessed July 23, 2021)
Created April 27, 2018, Updated November 10, 2018