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Quantum-correlated photon pairs generated in commercial 45 nm complementary metal-oxide semiconductor microelectronics



Cale M. Gentry, Jeff Shainline, Mark W. Wade, Martin Stevens, Shellee D. Dyer, Xiaoge Zeng, Fabio Pavanello, Thomas Gerrits, Sae Woo Nam, Richard Mirin, Milos A. Popovic


Correlated photon pairs are a fundamental component of quantum photonic systems. While pair sources have previously been integrated on silicon chips in custom facilities, these often take advantage of only a small fraction of microelectronics fabrication techniques and have yet to be integrated in a process which also supports electronics. Here we report the first demonstration of quantum-correlated photon pair generation in a device fabricated in an unmodified state-of-the-art complementary metal-oxide-semiconductor(CMOS) process, alongside millions of working transistors. With ultra-low on-chip pump powers ranging from 5 mW to 400 mW, we demonstrate pair generation rates between 165 Hz and 332 kHz using > 80percent efficient WSi superconducting nanowire single photon detectors. Coincidences-to-accidentals ratios consistently exceeding 40 were measured with a maximum of 55. In addition, we provide the first demonstration of an accurate prediction for pair generation rates in a microring-resonator from classical four-wave mixing measurements. This proof-of-principle device demonstrates the potential of commercial CMOS microelectronics as an advanced quantum photonics platform where state-of-the-art high-speed digital circuits could potentially interact with quantum photonic circuits.


Quantum optics, Photonic integrated circuits, Quantum information and processing, Wavelength conversion devices.


Gentry, C. , Shainline, J. , Wade, M. , Stevens, M. , Dyer, S. , Zeng, X. , Pavanello, F. , Gerrits, T. , Nam, S. , Mirin, R. and Popovic, M. (2015), Quantum-correlated photon pairs generated in commercial 45 nm complementary metal-oxide semiconductor microelectronics, Optica, [online], (Accessed July 24, 2024)


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Created July 6, 2015, Updated October 12, 2021