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Quantitative measurements of elastic properties with ultrasonic-based AFM and conventional techniques



Donna C. Hurley


A key motivation for the original development of ultrasonic-AFM based methods was to enable measurements of elastic properties with nanoscale spatial resolution. In this chapter, we discuss the quantitative measurement of elastic modulus with ultrasonic-based AFM methods and compare it to measurement by more conventional or established techniques. First, we present the basic principles of modulus measurement with ultrasonic-based AFM methods that involve contact resonance spectroscopy, such as atomic force acoustic microscopy (AFAM) and ultrasonic AFM (U-AFM). Fundamental concepts of modulus measurement with more established approaches, especially instrumented (nano-) indentation (NI) and surface acoustic wave (SAW) spectroscopy, are then discussed. We consider the relative strengths and limitations of various approaches, for example measurement accuracy, spatial resolution, and applicability to different materials. Example results for specific material systems are given with an emphasis on studies involving direct intercomparison of different techniques. Finally, current research in this area and opportunities for future work are described.
Scanning Probe Acoustic Techniques
Publisher Info
Springer Verlag, Berlin, -1


nanomechanics, elastic modulus, atomic force microscopy


Hurley, D. (2013), Quantitative measurements of elastic properties with ultrasonic-based AFM and conventional techniques, Springer Verlag, Berlin, -1, [online], (Accessed April 22, 2024)
Created January 1, 2013, Updated November 10, 2018