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Quantitative Electron Probe Microanalysis of Rough, Bulk Samples



Dale E. Newbury


Surface roughness degrades the accuracy of quantitative electron probe x-ray microanalysis through the action of geometric effects on x-ray production and absorption. Measurements of rough surfaces produced on NIST microhomogeneous SRMs will be used to address key questions on the phenomenon: (1) What is the magnitude of the roughness (geometrical) effect? (2) What is its dependence on photon energy? (3) Can overscanning a rough area, assuming it is locally homogeneous in composition, compensate for roughness? (4) Can the peak-to-local-background ratio be used to compensate for roughness effects in point analyses?
Microbeam Analysis


electron probe x-ray microanalysis, energy dispersive x-ray spectrometry, microanalysis, quantitative x-ray analysis


Newbury, D. (2000), Quantitative Electron Probe Microanalysis of Rough, Bulk Samples, Microbeam Analysis (Accessed May 28, 2024)


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Created January 1, 2000, Updated February 17, 2017