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Quantitative Electron-Excited X-ray Microanalysis with Low Energy L-Peaks



Dale E. Newbury, Nicholas Ritchie


Quantitative electron-excited X-ray microanalysis that follows the standards-based intensity ratio method produces accurate results and an analytical total near unity based upon extensive testing on known materials. This paper investigates a significant departure from this experience when low photon energy L-shell peaks below 1 keV are measured with a pure element serving as the peak fitting reference and standard. This deviation can be greatly reduced and brought within the normal range by using a stoichiometric compound or other multi-element material to serve as the reference and standard.
Microscopy and Microanalysis


electron-excited X-ray microanalysis, quantitative analysis, L-shell characteristic X-rays


Newbury, D. and Ritchie, N. (2021), Quantitative Electron-Excited X-ray Microanalysis with Low Energy L-Peaks, Microscopy and Microanalysis, [online], (Accessed March 4, 2024)
Created August 12, 2021, Updated March 8, 2023