Newbury, D.
and Ritchie, N.
(2021),
Quantitative Electron-Excited X-ray Microanalysis with Low Energy L-Peaks, Microscopy and Microanalysis, [online], https://doi.org/10.1017/S1431927621012617, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929533
(Accessed October 14, 2025)
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Quantitative Electron-Excited X-ray Microanalysis with Low Energy L-Peaks
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Author(s)
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Abstract
Quantitative electron-excited X-ray microanalysis that follows the standards-based intensity ratio method produces accurate results and an analytical total near unity based upon extensive testing on known materials. This paper investigates a significant departure from this experience when low photon energy L-shell peaks below 1 keV are measured with a pure element serving as the peak fitting reference and standard. This deviation can be greatly reduced and brought within the normal range by using a stoichiometric compound or other multi-element material to serve as the reference and standard.Citation
Microscopy and Microanalysis
Volume
27
Pub Type
Journals
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Keywords
electron-excited X-ray microanalysis, quantitative analysis, L-shell characteristic X-rays
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Created August 12, 2021, Updated September 29, 2025