Probe-Force Calibration Experiments Using the NIST Electrostatic Force Balance
Jon R. Pratt, David B. Newell, John A. Kramar, J Mulholland, Eric P. Whitenton
The sensitivity of a piezoresistive cantilever force sensor has been determined by probing the weighing pan of the NIST prototype electrostatic force balance. In this experiment, micronewton contact forces between a force probe and the balance''s weighing pan are determined from the voltage required to maintain the null position of the force balance. The force balance incorporates length and electrical metrology so that an electrical realization of force consistent with the International System of Units may be computed from measurements of the voltage and capacitance gradient. Here, the balance serves as a primary realization of force in an continuous range between 0 and 6 x 10^-5^ N, allowing calibration of the sensor against a traceable standard.
, Newell, D.
, Kramar, J.
, Mulholland, J.
and Whitenton, E.
Probe-Force Calibration Experiments Using the NIST Electrostatic Force Balance, 2003 ASPE Winter Topical Meeting
Machines & Processes for Micro-scale & Meso-scale Fabrication, Metrology, & Assembly, Gainesville, FL, USA
(Accessed September 26, 2023)