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Precision Measurement of Wavelengths Emitted by a Molecular Fluorine Laser at 157 nm

Published

Author(s)

Craig J. Sansonetti, Joseph Reader, K Vogler

Abstract

The wavelengths of six spectral lines emitted by a molecular fluorine (F2) laser at 157 nm were measured to high accuracy with the 10.7-m normal-icidence vacuum spectrograph at the National Institute of Standards and TEchnology. Lines from a Pt/Ne hollow cathode lamp served as wave ength standards. Spectra of the laser and the Pt/Ne lamp were photographed simultanaeously through an uncoated CaF2beam splitter. The optical paths were arranged so as to avoid shifts in line positions arising from possible differences in illumination of the grating by the two sources. The strongest lasing line was found to have a wavelength of 157.63094(10) nm. Changes in wavelength for variations in gas mixture, total gas pressure, and voltage were also measured.
Citation
Applied Optics
Volume
40
Issue
No. 12

Keywords

laser, line-width, microlithography, molecular fluorine, Pt/Ne hollow cathode lamp, wavelengths

Citation

Sansonetti, C. , Reader, J. and Vogler, K. (2001), Precision Measurement of Wavelengths Emitted by a Molecular Fluorine Laser at 157 nm, Applied Optics (Accessed April 23, 2024)
Created April 1, 2001, Updated February 17, 2017