Precise pitch-scaling of ultra-scaled carbon nanotube arrays within 3D DNA nano-trenches
Jason K. Streit, Jeffrey Fagan, Ming Zheng, Wei Sun, Peng Yin, Jie Shen, Zhao Zhao, Hareem Maune
Precise assembly of carbon nanotubes (CNTs) into densely-aligned uniformly parallel arrays has been the missing link towards the emerging ultra-scaled post-Si technology nodes specified in the International Technology Roadmap for Semiconductors (ITRS).Traditional thin-film-based approaches generally yield CNTs in irregular-spaced bundles or with wide orientation distribution, and lack a mechanism to effectively eliminate the mis-aligned CNTs. Therefore, the pitch limit and precision of CNT arrays, the key parameters defining the lateral CNT spacing, still fail to simultaneously meet the patterning requirements for the ultra-scaled technology nodes. We report the precisely scaling of inter- CNT pitch using a supramolecular assembly method called Spatially Hindered Integration of Nanowire Electronics (SHINE). Specifically, by using nano-trenches on micron-scale DNA brick crystals to spatially confine the directional assembly of CNTs mediated by DNA hybridization, we constructed parallel CNT arrays with uniform pitches down to 10.4 nm at an assembly yield over 95%. The pitch precision improves by more than two magnitudes compared to those prepared from conventional thin-film approaches. Furthermore, we directional placed the CNT-decorated DNA brick crystals on silicon substrate and achieved millimeter-scale arrays. Finally, as a proof of concept, we explored a complementary metal-oxide-semiconductor (CMOS) compatible process to remove DNA templates without affecting the alignment of CNTs, and demonstrated CNT FETs with uniformly prescribed pitch at 24 nm. Enabled by SHINE, both the inter-CNT pitch and the pitch precision simultaneously meet the patterning requirements of CNT arrays used in the ultra- scaled technology nodes for the first time. More generally, SHINE could possibly enable a supramolecular strategy to arrange diverse one-dimensional nanomaterials into large scale functional devices to enable future high-performance energy-efficient nano-electronics in post-
, Fagan, J.
, Zheng, M.
, Sun, W.
, Yin, P.
, Shen, J.
, Zhao, Z.
and Maune, H.
Precise pitch-scaling of ultra-scaled carbon nanotube arrays within 3D DNA nano-trenches, Science
(Accessed May 18, 2022)