Practical Aspects Impacting Time Synchronization Data Quality in Semiconductor Manufacturing

Published

November 30, 2006

Author(s)

Naveen Kalappa, James Moyne, Jonathan Parrott, Ya-Shian Li-Baboud

Abstract

As benefits begin to be realized for coordination of time-based information throughout the factory and enterprise, the need for synchronization of data at all levels of the enterprise becomes a primary data quality issue. The lack of precise time-stamping and time synchronization hinders data acquisition and advanced process control capabilities in the semiconductor manufacturing industry. In addressing this problem, it is important to note that effective and commercially viable methods for time synchronization of nodes on an Ethernet network to sub-millisecond levels are available. For example IEEE 1588 ? A Precision Clock Synchronization Protocol for Networked Measurement and Control Systems ? specifies software and hardware enhancement solutions for sub-millisecond synchronization. NIST and the Engineering Research Center for Reconfigurable Manufacturing Systems at the University of Michigan are working together, to investigate the practical aspects of time synchronization implementation in semiconductor manufacturing. In this paper, an experimental analysis of industrial quality networked environments is described that illustrates the impact of the various components on the time and data synchronization problem. A realistic assessment of what level of time synchronization can be achieved today is given. Additionally, the potential for improving node time synchronization by addressing the weak link of software delay and delay variability is explored.

Proceedings Title

Proceedings of the 2006 IEEE-1588 Conference

Conference Dates

October 2-4, 2006

Conference Location

Gaithersburg, MD, USA

Conference Title

Conference on IEEE-1588 Standard for a Precision Clock Synchronization Protocol for Networked Measurement and Control Systems

Pub Type

Conferences

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Keywords

advanced process contrl, semiconductor manufacturing, Time Synchronization

Citation

Kalappa, N. , Moyne, J. , Parrott, J. and Li-Baboud, Y. (2006), Practical Aspects Impacting Time Synchronization Data Quality in Semiconductor Manufacturing, Proceedings of the 2006 IEEE-1588 Conference, Gaithersburg, MD, USA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32530 (Accessed April 19, 2024)