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Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film

Published

Author(s)

Thomas A. Germer, Katelynn A. Sharma, Thomas G. Brown, James B. Oliver

Abstract

We extend the theory of Kassam et al. [J. Opt. Soc. Am. A 12, 2009-2021 (1995)] for scattering by oblique columnar structure thin films to include the induced form birefringence and the propagation of radiation in those films. We generalize the 4 x 4 matrix theory of Berreman [J. Opt. Soc. Am. 62, 502-510 (1972)] to include arbitrary sources in the layer, needed to determine the Green function for the inhomogeneous wave equation. We further extend first-order vector perturbation theory for scattering by roughness in the smooth surface limit, when the layer is anisotropic. Scattering by an inhomogeneous medium is approximated by a distorted Born approximation, where effective medium theory is used to determine the effective properties of the medium and strong fluctuation theory is used to determine the inhomogeneous sources. In this manner, we develop a model for scattering by inhomogeneous films, with anisotropic correlation functions. The results are compared to Mueller matrix bidirectional scattering distribution function (BSDF) measurements for a glancing angle deposition (GLAD) film. While the results are applied to the GLAD film example, the development of the theory is general enough that it can guide simulations for scattering in other anisotropic thin films.
Citation
Journal of the Optical Society of America A-Optics Image Science and Vision
Volume
34
Issue
11

Keywords

anisotropic, BRFD, BSDF, BTDF, films, glancing angle deposition, Mueller matrix, polarimetry, scattering

Citation

Germer, T. , Sharma, K. , Brown, T. and Oliver, J. (2017), Polarized optical scattering by inhomogeneities and surface roughness in an anisotropic thin film, Journal of the Optical Society of America A-Optics Image Science and Vision, [online], https://doi.org/10.1364/JOSAA.34.001974 (Accessed April 23, 2024)
Created October 16, 2017, Updated June 2, 2021