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A phononic bandgap shield for high-Q membrane microresonators



Raymond W. Simmonds, P.-L. Yu, Katarina Cicak, N. S. Kampel, Y. Tsaturyan, T. P. Purdy, C. A. Regal


A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.
Applied Physics Letters


nanomechanics, micromechanics, optomechanics


Simmonds, R. , Yu, P. , Cicak, K. , , N. , Tsaturyan, Y. , P., T. and Regal, C. (2014), A phononic bandgap shield for high-Q membrane microresonators, Applied Physics Letters, [online], (Accessed December 3, 2023)
Created January 15, 2014, Updated November 10, 2018