A phononic bandgap shield for high-Q membrane microresonators
Raymond W. Simmonds, P.-L. Yu, Katarina Cicak, N. S. Kampel, Y. Tsaturyan, T. P. Purdy, C. A. Regal
A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.
, Yu, P.
, Cicak, K.
, , N.
, Tsaturyan, Y.
, P., T.
and Regal, C.
A phononic bandgap shield for high-Q membrane microresonators, Applied Physics Letters, [online], https://doi.org/10.1063/1.4862031
(Accessed September 21, 2021)