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A phononic bandgap shield for high-Q membrane microresonators

Published

Author(s)

Raymond W. Simmonds, P.-L. Yu, Katarina Cicak, N. S. Kampel, Y. Tsaturyan, T. P. Purdy, C. A. Regal

Abstract

A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.
Citation
Applied Physics Letters
Volume
104
Issue
2

Keywords

nanomechanics, micromechanics, optomechanics

Citation

Simmonds, R. , Yu, P. , Cicak, K. , , N. , Tsaturyan, Y. , P., T. and Regal, C. (2014), A phononic bandgap shield for high-Q membrane microresonators, Applied Physics Letters, [online], https://doi.org/10.1063/1.4862031 (Accessed September 21, 2021)
Created January 15, 2014, Updated November 10, 2018