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Phase Identification of Individual Crystalline Particles by Electron Backscatter Diffraction



John A. Small, J R. Michael


Recently, an electron backscatter diffraction EBSD system was developed that uses a 1024 x 1024 CCD camera coupled to a thin scintillator rather than photographic film. In this system, crystallagraphic information is determined and coupled with the elemental information from energy or wavelength dispersive x-ray spectrometry and the phase identification is made through a link to a database such as the Powder Diffraction Files published by ICDD. This system has been applied almost exclusively to conventional, bulk probe samples which have been polished to a flat surface. In this investigation, we report on the application of the EBSD system to the phase identification of individual micrometer and submicrometer particles rather than flat surfaces. Unlike flat surfaces, the phase identification of individual particles could possibly be complicated by the small sample mass, particle morphology, and difficulty in obtaining an appropriate flat-field reference images.
Journal of Microscopy-Oxford
Part 1


electron diffraction (EBSD), particles, phase identification, scanning electron microscopy


Small, J. and Michael, J. (2001), Phase Identification of Individual Crystalline Particles by Electron Backscatter Diffraction, Journal of Microscopy-Oxford (Accessed May 26, 2024)


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Created January 1, 2001, Updated February 17, 2017