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Phase Identification of Individual Crystalline Particle by Electron Backscatter Diffraction



John A. Small, J R. Michael


Recently, an electron backscatter diffraction (EBSD) system was developed that uses a 1024 x 1024 CCD camera coupled to a thin phosper. This camera has been shown to produce excellent EBSD patterns. In this system, crystallographic information is determined from the EBSD pattern and coupled with the elemental information form energy or wavelength dispersive x-ray spectrometry. identification of the crystalline phase of a sample is then made through a link to a commercial diffraction database. To date, this system has been applied almost exclusively to conventional, bulk samples that have been polished to a flat surface. In this investigation, we report on the application of the EBSD system to the phase identification analysis of individual micrometer and submicrometer particles rather than flat surfaces.
Journal of Microscopy-Oxford
Pt. 1


electron backscatter diffraction, particle analysis, phase identification, scanning electron microscopy


Small, J. and Michael, J. (2001), Phase Identification of Individual Crystalline Particle by Electron Backscatter Diffraction, Journal of Microscopy-Oxford (Accessed April 16, 2024)
Created January 1, 2001, Updated February 17, 2017