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Overview of NIST GEC RF Reference Cell and ICP Projects

Published

Author(s)

J R. Roberts, Eric C. Benck, A Schwabedissen
Citation
Proc 3<sup>rd</sup>Int Conf on Reactive Plasmas and 14<sup>th</sup> Symposium on Plasma Processing
Publisher Info
Nara , Japan,

Citation

Roberts, J. , Benck, E. and Schwabedissen, A. (1997), Overview of NIST GEC RF Reference Cell and ICP Projects, Nara , Japan, (Accessed May 23, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1997, Updated February 17, 2017