Roberts, J.
, Benck, E.
and Schwabedissen, A.
(1997),
Overview of NIST GEC RF Reference Cell and ICP Projects, Nara , Japan,
(Accessed December 6, 2023)
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Overview of NIST GEC RF Reference Cell and ICP Projects
Published
Author(s)
, ,
Citation
Proc 3<sup>rd</sup>Int Conf on Reactive Plasmas and 14<sup>th</sup> Symposium on Plasma Processing
Publisher Info
Nara , Japan,
Pub Type
Books
Citation
Created January 1, 1997, Updated February 17, 2017