Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Overview of NIST GEC RF Reference Cell and ICP Projects



J R. Roberts, Eric C. Benck, A Schwabedissen
Proc 3<sup>rd</sup>Int Conf on Reactive Plasmas and 14<sup>th</sup> Symposium on Plasma Processing
Publisher Info
Nara , Japan,


Roberts, J. , Benck, E. and Schwabedissen, A. (1997), Overview of NIST GEC RF Reference Cell and ICP Projects, Nara , Japan, (Accessed May 23, 2024)


If you have any questions about this publication or are having problems accessing it, please contact

Created January 1, 1997, Updated February 17, 2017