Optimized superconducting detectors using the proximity effect in Ti/TiN multilayers

Published

June 14, 2013

Author(s)

David P. Pappas, Michael R. Vissers, Jiansong Gao, Martin O. Sandberg, David S. Wisbey, Kent D. Irwin

Abstract

We apply the superconducting proximity effect in TiN/Ti multi-layers films to tune the critical temperature, $T_C$ (to within 10 mK) with high uniformity (less than 15 mK spread) across a 75 mm wafer. Reproducible $T_C$'s are obtained from 0.8 - 2.5 K. These films had high resistivities, $\ge 100$ $\mu \Ω$-cm and internal quality factors on the order of 100k and higher for resonators in the GHz range. Both trilayers of TiN/Ti/TiN and thicker multilayer films were prepared, demonstrating a highly controlled process for films from less than 15 nm to at least 60 nm thick. Detectors were fabricated and showed single photon resolution at 1550 nm. The high uniformity and controllability coupled with the high quality factor, kinetic inductance, and inertness of TiN make these films ideal for use in frequency multiplexed kinetic inductance detectors and other potential applications such as nano-wire detectors, transition edge sensors and associated quantum information applications.

Citation

Applied Physics Letters

Volume

102

Issue

23

Pub Type

Journals

Download Paper

DOI Link

Keywords

Kinetic inductance sensors, superconductivity, resonators, single photon

Citation

Pappas, D. , Vissers, M. , Gao, J. , Sandberg, M. , Wisbey, D. and Irwin, K. (2013), Optimized superconducting detectors using the proximity effect in Ti/TiN multilayers, Applied Physics Letters, [online], https://doi.org/10.1063/1.4804286 (Accessed October 9, 2025)