Optimization of Focused Ion Beam-Tomography for Superconducting Electronics
Aric W. Sanders, Anna E. Fox, Paul D. Dresselhaus, Alexandra Curtin
Superconducting electronics play an important role in quantum computation, ultra-low power electronics, voltage standards and magnetic sensors. Many of these applications rely on the microfabrication of superconducting circuits with multiple wiring layers and a range of active elements. The performance of these superconducting circuits are directly related to the three dimensional microstructure of these wiring layers and active elements. Focused ion beam tomography is an ideal tool for exploring this microstructure, however the processes of milling, imaging, and reconstruction must be optimized for the information most pertinent to superconducting electronics. We present the optimization of tomographic collection and reconstruction using the NIST designed 10 V Programmable Josephson Voltage Standard (PJVS).
, Fox, A.
, Dresselhaus, P.
and Curtin, A.
Optimization of Focused Ion Beam-Tomography for Superconducting Electronics, Microscopy and Microanyalsis, Hartford, CT, [online], https://doi.org/10.1017/S1431927614005583
(Accessed January 23, 2022)