Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

A Novel Test Method for Measuring Mechanical Properties at the Small-Scale: The Theta Specimen

Published

Author(s)

George D. Quinn, Lin-Sien H. Lum, Dan Xiang, Ajitkumar Jillavenkatesa, Li Ma, Douglas T. Smith

Abstract

A test method has been developed for measuring mechanical properties of material structures at the small-scale. Round or hexagonal rings are compressed vertically on their ends thereby creating a uniform tension stress in a horizontal crossbar that serves as the gauge section. The compression loading scheme is simple and eliminates the need for special grips. A conventional nanoindentation hardness machine serves as a small-scale universal testing machine that applies load and monitors displacement. Prototype miniature silicon specimens were fabricated by deep reactive ion etching (DRIE) of a single crystal wafer and were tested to fracture. Finite element analysis confirmed that the stress distribution was very uniform in the web portion of the specimen. The theta specimen is a versatile configuration and has great potential for use with a variety of materials and for testing extremely small structures.
Proceedings Title
29th International Conf. On Advanced Ceramics & Composites
Volume
26
Issue
2
Conference Dates
January 28-29, 2005
Conference Title
Ceramic Engineering and Science Conference

Keywords

DRIE, fracture origin, silicon, theta specimen

Citation

Quinn, G. , Lum, L. , Xiang, D. , Jillavenkatesa, A. , Ma, L. and Smith, D. (2005), A Novel Test Method for Measuring Mechanical Properties at the Small-Scale: The Theta Specimen, 29th International Conf. On Advanced Ceramics & Composites (Accessed February 28, 2024)
Created June 9, 2005, Updated February 19, 2017