White, C.
and Wu, W.
(1998),
A Novel Method to Determine the Mechanical Properties of Ultra-Thin Films, Low-Dielectric Constant Materials IV, Undefined
(Accessed March 21, 2025)
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A Novel Method to Determine the Mechanical Properties of Ultra-Thin Films
Published
Author(s)
,
Abstract
Recent experimental results based on x-ray reflectivity, ellipsometry and positron annihilation spectroscopy, etc. have demonstrated that physical properties of polymer films thinner than one micron may deviate significantly from the expected bulk values. The mechanical properties of the ultra-thin films (sub-micron) are experimentally difficult to determine with precision. The quartz crystal microbalance is an established technique for measuring the mechanical properties of sub-micron polymer films with high precision. The details and preliminary results from this recently modified quartz crystal microbalance technique will be presented.Proceedings Title
Low-Dielectric Constant Materials IV
Volume
511
Conference Dates
April 14-16, 1998
Conference Location
Undefined
Conference Title
MRS Proceedings
Pub Type
Conferences
Keywords
high precision, mechanical properties, physical properties, polymer, quartz crystal microbalance, ultra-thin films
Citation
Issues
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Created March 31, 1998, Updated October 12, 2021