New reference standards and artifacts for nanoscale physical property characterization
Jon R. Pratt, John A. Kramar, Gordon Shaw, Richard Gates, Paul Rice, John M. Moreland
This paper provides an overview of calibration artifacts being developed at the National Institute of Standards and Technology (NIST) that are intended to aid the accurate determination of nanoscale physical properties across a broad range of applications. We focus on three proposed reference standards: an SI traceable spring constant artifact for calibration of atomic force microscopy cantilever stiffness in the nominal range between 0.02 N/m and 0.2 N/m, a piezoresistive force sensor for SI calibration of micronewton level contact forces and a torsional oscillator for the absolute measurement of thin-film magnetic moments on the order of 1 υA m2.
IEEE Transactions on Nanotechnology
atomic force microscopy, cantilever spring constant measurement, magnetic moment measurement, standard references and practices
, Kramar, J.
, Shaw, G.
, Gates, R.
, Rice, P.
and Moreland, J.
New reference standards and artifacts for nanoscale physical property characterization, IEEE Transactions on Nanotechnology
(Accessed December 6, 2023)