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New Industry Requirements for Clock Synchronization and Time Stamping

Published

Author(s)

Harvey Wohlwend, Ya-Shian Li-Baboud

Abstract

This presentation will report on the results of an industry working group studying time synchronization. The working group will present new industry requirements as well as guidelines for improving time synchronization and time stamping. Efficient communication of timing information can be achieved by integrating timing standards into current SEMI standards. After an in-depth review of SEMI standards, recommendations on SEMI standards to improve factory and equipment clock synchronization and time stamping will also be described.
Proceedings Title
European AEC/APC Symposium
Conference Dates
March 27-31, 2006
Conference Location
Aix En Provence, 1, FR

Keywords

Advanced Process Control, Data Quality, Semiconductor Manufacturing, Time Stamping, Time Synchronization

Citation

Wohlwend, H. and Li-Baboud, Y. (2006), New Industry Requirements for Clock Synchronization and Time Stamping, European AEC/APC Symposium, Aix En Provence, 1, FR (Accessed May 19, 2024)

Issues

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Created March 26, 2006, Updated October 12, 2021