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New Developments in Data for Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy

Published

Author(s)

Cedric J. Powell, Aleksander Jablonski, Francesc Salvat, S Tanuma, David R. Penn

Abstract

A brief description is given of three recent developments concerning the generation and application of data for elastic and inelastic scattering of electrons relevant to Auger-electron spectroscopy (AES) and X-ray photoelectron spectroscopy. First, an extensive analysis of calculated and measured differential cross sections for elastic scattering of electrons by atoms has been published. Second, new calculations have been made of electron inelastic mean free paths for additional solids. Third, new Monte Carlo simulations of electron backscattering relevant to AES have been performed that make use of the most-up-to-date values of the relevant cross sections. Calculated values of electron backscattering factors for four illustrative Auger transitions and energies between 3 keV and 10 keV agree reasonably with values from Shimizu's empirical formula for normal incidence. Values of the information radius for a copper film on silicon and gold substrates have been obtained at energies of 5 keV and 10 keV.
Citation
Journal of Surface Science
Volume
12 No 2

Keywords

Auger electron spectroscopy, data, elastic scattering, electron backscattering, inelastic scattering, information radius, surface analysis, x-ray photoelctron spectroscopy

Citation

Powell, C. , Jablonski, A. , Salvat, F. , Tanuma, S. and Penn, D. (2008), New Developments in Data for Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy, Journal of Surface Science (Accessed April 20, 2024)
Created October 16, 2008