An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Nanoscale Oxidation of Zirconium Surfaces: Kinetics and Mechanisms
Published
Author(s)
Natalia Farkas, Li Zhang, E A. Evans, R Ramsier, John A. Dagata
Abstract
We show that AFM-induced oxide features can be reproducibly formed on both Zr and ZrN surfaces, and that the growth rate decreases rapidly with increasing time. There is an increase in oxide-feature height with humidity for both systems, and an approximately linear dependence of the height of the structures on the applied voltage for all films for short exposure times. As the anodization time increases, the thinnest (6 nm) films show a large enhancement in oxide-feature height whereas the behavior of the other films is unchanged, demonstrating the role of the film/substrate interface. Under the same conditions, the height of features grown on ZrN films is greater than for those grown on Zr films, indicating that nitrogen plays a role in the oxidation process.
Citation
Journal of Vacuum Science and Technology A
Volume
21(4)
Issue
No. 4
Pub Type
Journals
Keywords
atomic force microscopy, local oxidation, zirconium, zirconium nitride
Farkas, N.
, Zhang, L.
, Evans, E.
, Ramsier, R.
and Dagata, J.
(2003),
Nanoscale Oxidation of Zirconium Surfaces: Kinetics and Mechanisms, Journal of Vacuum Science and Technology A
(Accessed April 23, 2024)