Nanofabrication of a two-dimensional array using laser-focused atomic deposition
R Gupta, Robert Celotta, Zeina J. Kubarych, J Mcclelland
Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13? 1 nm high and having a full-width at half maximum of 80? 10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 ?m X 200 ?m. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.
Applied Physics Letters
Atom optics, Atomic deposition, Nanofabrication, Physics