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Nanofabrication of a two-dimensional array using laser-focused atomic deposition



R Gupta, Robert Celotta, Zeina J. Kubarych, J Mcclelland


Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13? 1 nm high and having a full-width at half maximum of 80? 10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 ?m X 200 ?m. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.
Applied Physics Letters
67 (10)


Atom optics, Atomic deposition, Nanofabrication, Physics


Gupta, R. , Celotta, R. , Kubarych, Z. and Mcclelland, J. (1995), Nanofabrication of a two-dimensional array using laser-focused atomic deposition, Applied Physics Letters (Accessed May 25, 2024)


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Created June 26, 1995, Updated October 12, 2021