Gupta, R.
, Celotta, R.
, Kubarych, Z.
and Mcclelland, J.
(1995),
Nanofabrication of a two-dimensional array using laser-focused atomic deposition, Applied Physics Letters
(Accessed May 11, 2025)
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Nanofabrication of a two-dimensional array using laser-focused atomic deposition
Published
Author(s)
, , , J Mcclelland
Abstract
Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13? 1 nm high and having a full-width at half maximum of 80? 10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 ?m X 200 ?m. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.Citation
Applied Physics Letters
Volume
67 (10)
Pub Type
Journals
Keywords
Atom optics, Atomic deposition, Nanofabrication, Physics
Citation
Issues
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Created June 26, 1995, Updated October 12, 2021