Nanofabrication of a Two-Dimensional Array Using Laser-Focused Atomic Deposition

Published

September 4, 1995

Author(s)

R Gupta, Jabez J. McClelland, Zeina J. Kubarych, Robert Celotta

Abstract

Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13plus or minus}1 nm high and having a full-width at half maximum of 80plus or minus}10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 mu m X 200 mu m. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.

Citation

Applied Physics Letters

Volume

67

Issue

10

Pub Type

Journals

Keywords

Atom Optics, Atomic Deposition, Nanofabrication, Physics

Citation

Gupta, R. , McClelland, J. , Kubarych, Z. and Celotta, R. (1995), Nanofabrication of a Two-Dimensional Array Using Laser-Focused Atomic Deposition, Applied Physics Letters (Accessed December 6, 2023)