Nanofabrication of a Two-Dimensional Array Using Laser-Focused Atomic Deposition
R Gupta, Jabez J. McClelland, Zeina J. Kubarych, Robert Celotta
Fabrication of a two-dimensional array of nanometer-scale chromium features on a silicon substrate by laser-focused atomic deposition is described. Features 13plus or minus}1 nm high and having a full-width at half maximum of 80plus or minus}10 nm are fabricated in a square array with lattice constant 212.78 nm, determined by the laser wavelength. The array covers an area of approximately 100 mu m X 200 mu m. Issues associated with laser-focusing of atoms in a two-dimensional standing wave are discussed, and potential applications and improvements of the process are mentioned.
Applied Physics Letters
Atom Optics, Atomic Deposition, Nanofabrication, Physics