A Multiscale Fabrication Approach to Microfluidic System Development

Published

January 1, 2004

Author(s)

Tony L. Schmitz, John A. Dagata, Brian S. Dutterer, W G. Sawyer

Abstract

Microfluidic systems for analytical, medical, and sensing applications integrate optical or electrical readouts in low-cost, low-volume consumption systems. Embedding chemically functionalized templates with nanoscale topography within these devices links the scale at which molecular recognition and self-organization occurs and the macroscopic layout of fluid channels, mixing volumes, and detection regions. This paper addresses a path toward standardization of manufacturing procedures for microfluidic devices through: 1) scanning probe lithography to produce sub-50-nm scale features in a silicon master; 2) master replication in plastics by hot embossing; and 3) the development of a generic microfluidic experimental platform that orients 125 micrometer channels embossed in a poly (vinyl chloride) gasket to an array of high-speed machined channels and a silicon substrate.

Citation

J. Manufacturing Processes

Volume

6

Pub Type

Journals

Keywords

machining, micro-forming, nano-lithography

Citation

Schmitz, T. , Dagata, J. , Dutterer, B. and Sawyer, W. (2004), A Multiscale Fabrication Approach to Microfluidic System Development, J. Manufacturing Processes (Accessed May 9, 2025)