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A Multiscale Fabrication Approach to Microfluidic System Development



Tony L. Schmitz, John A. Dagata, Brian S. Dutterer, W G. Sawyer


Microfluidic systems for analytical, medical, and sensing applications integrate optical or electrical readouts in low-cost, low-volume consumption systems. Embedding chemically functionalized templates with nanoscale topography within these devices links the scale at which molecular recognition and self-organization occurs and the macroscopic layout of fluid channels, mixing volumes, and detection regions. This paper addresses a path toward standardization of manufacturing procedures for microfluidic devices through: 1) scanning probe lithography to produce sub-50-nm scale features in a silicon master; 2) master replication in plastics by hot embossing; and 3) the development of a generic microfluidic experimental platform that orients 125 micrometer channels embossed in a poly (vinyl chloride) gasket to an array of high-speed machined channels and a silicon substrate.
J. Manufacturing Processes


machining, micro-forming, nano-lithography


Schmitz, T. , Dagata, J. , Dutterer, B. and Sawyer, W. (2004), A Multiscale Fabrication Approach to Microfluidic System Development, J. Manufacturing Processes (Accessed December 4, 2023)
Created December 31, 2003, Updated October 12, 2021