Multifunctional ToF-SIMS: Combinatorial Mapping of Gradient Energy Substrates

Published

November 1, 2002

Author(s)

S V. Roberson, Albert J. Fahey, A Sehgal, Alamgir Karim

Abstract

We present a simple method for chemical modification of chlorosilane self-assembled monolayers (SAMS) on Si surfaces by exposure to a gradient of UV-ozone radiation to create stable substrates with a range of contact angles (θ H2O {approximately equal to} 5{degrees C} - 95{degrees C}) and surface energies on a single substrate. These gradient energy substrates are developed to potentially generate libraries for combinatorial studies of thin film phenomenology. The graded oxidation process presents a systematic variation of surface chemical composition. We have utilized contact angle measurements and time-of-flight secondary ion mass spectrometry (TOF-SIMS) to investigate this variation for a series of ions, among which are SiCH₃⁺, SiOH⁺ and COOH^-. We show that the macroscopic measurements of surface free energy/contact angle correlate with the detailed analysis of surface chemistry (as assessed by TOF-SIMS) on these test substrates.

Citation

Applied Surface Science

Volume

200

Issue

No. 1-4

Pub Type

Journals

Keywords

surface energy gradient, ToF-SIMS, UV-ozone treatment

Citation

Roberson, S. , Fahey, A. , Sehgal, A. and Karim, A. (2002), Multifunctional ToF-SIMS: Combinatorial Mapping of Gradient Energy Substrates, Applied Surface Science (Accessed May 13, 2025)