Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

A moving window correlation method to reduce the distortion of SPM images

Published

Author(s)

Wei Chu, Joseph Fu, Ronald G. Dixson, Ndubuisi G. Orji, Theodore V. Vorburger

Abstract

Many scanning probe microscopes (SPMs), such as the scanning tunneling microscope (STM) and atomic force microscope (AFM), use piezoelectric actuators operating in open loop for generating the scans of the surfaces. However, nonlinearities mainly caused by hysteresis and drift of piezoelectric actuators reduce the positioning accuracy and produce distorted images. A moving window correlation method is proposed in this paper to determine and quantify the hysteresis. This method requires both trace and retrace profiles to be recorded. With a window imposed on each of the profiles, correlations are implemented between the data inside two windows to find corresponding pixel pairs on two different profiles but the same physical positions along the fast scanning axis (x). The x-distances between pixel pairs are calculated and then a simple correction scheme is applied to reduce the distortion.
Citation
Review of Scientific Instruments
Volume
80

Citation

Chu, W. , Fu, J. , Dixson, R. , Orji, N. and Vorburger, T. (2009), A moving window correlation method to reduce the distortion of SPM images, Review of Scientific Instruments (Accessed June 24, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created August 20, 2009, Updated February 19, 2017