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Modified Predictive Formula for the Electron Stopping Power

Published

Author(s)

Aleksander Jablonski, S Tanuma, Cedric J. Powell

Abstract

We report an improved predictive formula for the electron stopping power (SP) based on an analysis and fit of SPs and electron inelastic mean free paths (IMFPs) calculated from optical data for 37 elemental solids and energies between 200 eV and 30 keV. The new formula is a function of energy, density, and IMFP, and is recommended for solids with atomic numbers larger than six. While the mean deviation between predicted and calculated SPs was 7.25 %, larger deviations were found for four additional materials, Li ( ), Be ( ), graphite ( ), and diamond ( ). The predictive SP formula can be applied to multi-component materials. Test comparisons for two compounds, guanine and InSb, showed average deviations of 16.2 % and 20.1 %, respectively. The new SP formula is expected to be useful in simulations of electron trajectories in solids with the continuous slowing-down approximation (e.g., in Auger-electron spectroscopy and electron microprobe analysis).
Citation
Journal of Applied Physics
Volume
063708

Keywords

continuous slowing-down approximation, electron, electron transport, predictive formula, simulations, stoppping power

Citation

Jablonski, A. , Tanuma, S. and Powell, C. (2008), Modified Predictive Formula for the Electron Stopping Power, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=831438 (Accessed February 29, 2024)
Created March 18, 2008, Updated October 12, 2021