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Models for Relating Scanning Electron Microscopy Images to Measured Artifacts



Michael T. Postek, Andras Vladar, J R. Lowney


A specific example of a technique we developed to enhance the information obtained from SEM images is the extraction of an approximate profile corresponding to an electron beam with zero beam diameter from one with a finite beam diameter. Results were obtained for the simulated backscattered and secondary electron yields, respectively, from a 1 um step in a silicon substrate at 1 keV beam energy. Finer detail has been extracted from the original signal by this method, and allows for more information to be obtained about the target geometry.
Proceedings of Scanning 96


Postek, M. , Vladar, A. and Lowney, J. (1996), Models for Relating Scanning Electron Microscopy Images to Measured Artifacts, Proceedings of Scanning 96 (Accessed June 21, 2024)


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Created March 31, 1996, Updated October 12, 2021