Microstructural Properties of (Ba,Sr)Ti03 Films Fabricated from BaF2/SrF2/Ti02 Amorphouse Multilayers Using the Combinatorial Precursor Method
Ichiro Takeuchi, K S. Chang, R P. Sharma, Leonid A. Bendersky, H C. Chang, X D. Xiang, E A. Stach, C Y. Song
We have investigated the microstructure of (Ba,Sr)Ti03 films fabricated from BaF2/SrF2/Ti02 amorphouse multilayers. Rutherford backscattering spectroscopy and x-ray diffraction studies show that a controlled thermal treatment can interdiffuse the multilayers so as to create predominantly single-phase epitaxial (Ba,Sr)Ti03 films. High resolution cross-sectional transmission electron microscopy investigation of the processed films shows that they consist of large epitaxial grains of (Ba,Sr)Ti03 with atomically sharp interfaces with the LaAl03 substrates. In addition, we have identified regions where polycrystalline and amorphous phases exist in small pockets in the film matrix. The results here indicate that the combinatorial thin-film synthesis using precursors can produce (Ba,Sr)Ti03 films in combinatorial libraries which exhibit properties similar to those films made by conventional techniques.
Journal of Applied Physics
(Ba, Sr)Ti0<sub>3</sub>, combinatorial, PLD, TEM, thin films
, Chang, K.
, Sharma, R.
, Bendersky, L.
, Chang, H.
, Xiang, X.
, Stach, E.
and Song, C.
Microstructural Properties of (Ba,Sr)Ti0<sub>3</sub> Films Fabricated from BaF<sub>2</sub>/SrF<sub>2</sub>/Ti0<sub>2</sub> Amorphouse Multilayers Using the Combinatorial Precursor Method, Journal of Applied Physics
(Accessed November 30, 2023)